We present the design and characterization of highly directional vertical grating couplers. The CMOS process achieved -1.2 dB coupling efficiency with 78nm 1- dB bandwidth realized in a commercially available 45nm microelectronics SOI system..


Vladimir Stojanovic, Rajeev J. Ram, Milos Popovic, Sen Lin, Sajjad Moazeni, Mark Wade, Chen Sun, Luca Alloatti, Amir Atabaki, Fabio Pavanello, Nandish Mehta, and Pavan Bhargava

Published in: 2015 IEEE Optical Interconnects Conference (OI)

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