Abstract:
We present the design and characterization of highly directional vertical grating couplers. The CMOS process achieved -1.2 dB coupling efficiency with 78nm 1- dB bandwidth realized in a commercially available 45nm microelectronics SOI system..
Authors:
Vladimir Stojanovic, Rajeev J. Ram, Milos Popovic, Sen Lin, Sajjad Moazeni, Mark Wade, Chen Sun, Luca Alloatti, Amir Atabaki, Fabio Pavanello, Nandish Mehta, and Pavan Bhargava
Published in: 2015 IEEE Optical Interconnects Conference (OI)
